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                                       Details for article 7 of 32 found articles
 
 
  Deposition conditions and composition and structure relationships for nitride carbon films obtained by ECR plasma-assisted CVD and reactive rf magnetron sputtering
 
 
Title: Deposition conditions and composition and structure relationships for nitride carbon films obtained by ECR plasma-assisted CVD and reactive rf magnetron sputtering
Author: Jastrabik, L.
Soukup, L.
Shaginyan, L.R.
Onoprienko, A.A.
Appeared in: Surface & coatings technology
Paging: Volume 123 (2000) nr. 2-3 pages 7 p.
Year: 2000
Contents:
Publisher: Elsevier Science S.A.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 7 of 32 found articles
 
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