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Journal description
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Details for article 32 of 32 found articles
| Title: |
Tungsten–carbon thin films deposited using screen grid technique in an electron cyclotron resonance chemical vapour deposition system |
| Author: |
Rusli, Yoon, S.F. Yang, H. Ahn, J. Huang, Q.F. Zhang, Q. Guo, Y.P. Yang, C.Y. Teo, E.J Wee, A.T.S. Huan, A.C.H. Watt, F. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 123 (2000) nr. 2-3 pages 6 p. |
| Year: |
2000 |
| Contents: | |
| Publisher: |
Elsevier Science S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 32 of 32 found articles
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