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                                       Details for article 1 of 77 found articles
 
 
  Active and passive plasma spectroscopy in a plasma immersion ion implantation (PIII) experiment
 
 
Title: Active and passive plasma spectroscopy in a plasma immersion ion implantation (PIII) experiment
Author: Ueda, M
Stellati, C
Spassov, V.A
Barroso, J.J
Nono, M.C.A
Appeared in: Surface & coatings technology
Paging: Volume 112 (1999) nr. 1-3 pages 4 p.
Year: 1999
Contents:
Publisher: Elsevier Science S.A.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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