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Journal description
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Details for article 1 of 14 found articles
| Title: |
A mass-spectroscopical study of the decomposition of Ti(NMe2)4 in a mixed Ar–H2–N2 pulsed d.c. plasma |
| Author: |
Driessen, J.P.A.M. Kuypers, A.D. Schoonman, J. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 110 (1998) nr. 3 pages 11 p. |
| Year: |
1998 |
| Contents: | |
| Publisher: |
Elsevier Science S.A. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 14 found articles
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