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Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering |
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Title: |
Deposition of PZT thin film onto copper-coated polymer films by mean of pulsed-DC and RF-reactive sputtering |
Author: |
Suchaneck, G. Labitzke, R. Adolphi, B. Jastrabik, L. Adamek, P. Drahokoupil, J. Hubicka, Z. Kiselev, D.A. Kholkin, A.L. Gerlach, G. Dejneka, A. |
Appeared in: |
Surface & coatings technology |
Paging: |
Volume 205 (2011) nr. S2 pages 4 p. |
Year: |
2011 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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