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                                       Details for article 119 of 133 found articles
 
 
  The influence of the target age on laterally resolved ion distributions in reactive planar magnetron sputtering
 
 
Title: The influence of the target age on laterally resolved ion distributions in reactive planar magnetron sputtering
Author: Welzel, Thomas
Ellmer, Klaus
Appeared in: Surface & coatings technology
Paging: Volume 205 (2011) nr. S2 pages 5 p.
Year: 2011
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 119 of 133 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands