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Journal description
All volumes of the corresponding journal
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Details for article 69 of 227 found articles
| Title: |
Electron shading damage enhancement due to nonuniform in-hole etch rate in deep contact-hole process |
| Author: |
Lee, Jeongyun Kim, Seok-Nyeon Kim, Dong-Hwan Chung, Ilsub |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 205 (2010) nr. S1 pages 5 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 69 of 227 found articles
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