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Journal description
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Details for article 116 of 227 found articles
| Title: |
Mass density control of carbon films deposited by H-assisted plasma CVD method |
| Author: |
Urakawa, Tatsuya Matsuzaki, Hidehumi Yamashita, Daisuke Uchida, Giichiro Koga, Kazunori Shiratani, Masaharu Setsuhara, Yuichi Sekine, Makoto Hori, Masaru |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 228 (2013) nr. S1 pages 4 p. |
| Year: |
2013 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 116 of 227 found articles
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