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Journal description
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Details for article 47 of 70 found articles
| Title: |
On the effects of thickness on adhesion of TiW diffusion barrier coatings in silicon integrated circuits |
| Author: |
Roshanghias, A. Khatibi, G. Pelzer, R. Steinbrenner, J. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 259 (2014) nr. PC pages 7 p. |
| Year: |
2014 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 47 of 70 found articles
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