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                                       Details for article 28 of 70 found articles
 
 
  Growth and properties of amorphous Ti–B–Si–N thin films deposited by hybrid HIPIMS/DC-magnetron co-sputtering from TiB2 and Si targets
 
 
Title: Growth and properties of amorphous Ti–B–Si–N thin films deposited by hybrid HIPIMS/DC-magnetron co-sputtering from TiB2 and Si targets
Author: Fager, H.
Greczynski, G.
Jensen, J.
Lu, J.
Hultman, L.
Appeared in: Surface & coatings technology
Paging: Volume 259 (2014) nr. PC pages 6 p.
Year: 2014
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 28 of 70 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands