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                                       Details for article 32 of 314 found articles
 
 
  Cathodic arc plasma deposition of nano-multilayered ZrN/AlSiN thin films
 
 
Title: Cathodic arc plasma deposition of nano-multilayered ZrN/AlSiN thin films
Author: Kim, Sun Kyu
Van Le, Vinh
Appeared in: Surface & coatings technology
Paging: Volume 206 (2011) nr. 6 pages 4 p.
Year: 2011
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 32 of 314 found articles
 
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