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Journal description
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Details for article 297 of 314 found articles
| Title: |
Thermodynamical analysis of Al and Si halide gaseous precursors in CVD. Review and approximation for deposition at moderate temperature in FBR-CVD process |
| Author: |
Brossard, J.M. Hierro, M.P. Sánchez, L. Bolívar, F.J. Pérez, F.J. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 201 (2006) nr. 6 pages 9 p. |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 297 of 314 found articles
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