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Journal description
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Details for article 26 of 206 found articles
| Title: |
Comparative study of high-power pulsed sputtering (HPPS) glow plasma techniques using Penning discharge and hollow-cathode discharge |
| Author: |
Azuma, Kingo Mieda, Ryosuke Yukimura, Ken Tamagaki, Hiroshi Okimoto, Tadao |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 206 (2011) nr. 5 pages 5 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 26 of 206 found articles
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