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Journal description
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Details for article 133 of 170 found articles
| Title: |
Structural and mechanical properties of amorphous silicon carbonitride films prepared by vapor-transport chemical vapor deposition |
| Author: |
Awad, Y. El Khakani, M.A. Aktik, C. Mouine, J. Camiré, N. Lessard, M. Scarlete, M. Al-Abadleh, H.A. Smirani, R. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 204 (2009) nr. 4 pages 7 p. |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 133 of 170 found articles
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