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Journal description
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Details for article 93 of 169 found articles
| Title: |
Ion energy and mass distributions of the plasma during modulated pulse power magnetron sputtering |
| Author: |
Lin, J. Moore, J.J. Sproul, W.D. Mishra, B. Rees, J.A. Wu, Z. Chistyakov, R. Abraham, B. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 203 (2009) nr. 24 pages 10 p. |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 93 of 169 found articles
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