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Journal description
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Details for article 104 of 124 found articles
| Title: |
Synchronous plasma enhancement in RF-driven plasma source for ion implantation |
| Author: |
Diplasu, C. Surmeian, A. Groza, A. Ganciu, M. |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 203 (2009) nr. 19 pages 5 p. |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 104 of 124 found articles
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