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Journal description
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Details for article 32 of 154 found articles
| Title: |
Deposition and etching of fluorocarbon thin films in atmospheric pressure DBDs fed with Ar–CF4–H2 and Ar–CF4–O2 mixtures |
| Author: |
Fanelli, Fiorenza Fracassi, Francesco d'Agostino, Riccardo |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 204 (2010) nr. 11 pages 6 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 32 of 154 found articles
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