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Journal description
All volumes of the corresponding journal
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All articles of the corresponding issues
Details for article 31 of 146 found articles
| Title: |
Effect of crystallinity and preferred orientation of Ta2N films on diffusion barrier properties for copper metallization |
| Author: |
Chung, Hung-Chin Liu, Chuan-Pu |
| Appeared in: |
Surface & coatings technology |
| Paging: | Volume 200 (2006) nr. 10 pages 5 p. |
| Year: |
2006 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 31 of 146 found articles
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