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                                       Details for article 73 of 227 found articles
 
 
  Etch characteristics of gallium indium zinc oxide thin films in a HBr/Ar plasma
 
 
Title: Etch characteristics of gallium indium zinc oxide thin films in a HBr/Ar plasma
Author: Kim, Eun Ho
Xiao, Yu Bin
Kong, Seon Mi
Chung, Chee Won
Appeared in: Surface & coatings technology
Paging: Volume 205 (2010) nr. S1 pages 5 p.
Year: 2010
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 73 of 227 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands