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                                       Details for article 116 of 139 found articles
 
 
  Studies on the low dielectric SiOC(–H) thin films deposited using MTMS and oxygen as precursors by UV source assisted PECVD
 
 
Title: Studies on the low dielectric SiOC(–H) thin films deposited using MTMS and oxygen as precursors by UV source assisted PECVD
Author: Yang, Chang Sil
Kannan, Meera
Kyu Choi, Chi
Appeared in: Surface & coatings technology
Paging: Volume 200 (2005) nr. 5-6 pages 5 p.
Year: 2005
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 116 of 139 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands