Application of the plasma surface sintering conditions in the synthesis of ReBx–Ti targets employed for hard films deposition in magnetron sputtering technique
Titel:
Application of the plasma surface sintering conditions in the synthesis of ReBx–Ti targets employed for hard films deposition in magnetron sputtering technique
Auteur:
Wicher, Bartosz Chodun, Rafał Trzcinski, Marek Lachowski, Artur Nowakowska-Langier, Katarzyna Ibrahim, Samih Haj Jaroszewicz, Jakub Kubiś, Michał Grzanka, Ewa Zdunek, Krzysztof
Verschenen in:
International journal of refractory metals and hard materials