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Journal description
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Details for article 78 of 120 found articles
| Title: |
Performance optimization of AlN ultrasonic thin-film sensors deposited by RF magnetron sputtering |
| Author: |
Xu, Chang Zeng, Xiaomei Zhang, Xiangyu Lv, Ting Jiang, Yanghui Wang, Zheng Ma, Xuejiao Ding, Yue Zhang, Jun Yang, Bing Liu, Sheng Pelenovich, Vasiliy O. |
| Appeared in: |
Ceramics international |
| Paging: | Volume 50 () nr. 24PC pages 55972-55978 |
| Year: |
2024 |
| Contents: | |
| Publisher: |
Elsevier Ltd and Techna Group S.r.l. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 78 of 120 found articles
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