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Structural control in atomic layer deposited hafnium oxide thin films through vertical cavity surface-emitting laser (VCSEL)-Based ultra-rapid heating |
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Titel: |
Structural control in atomic layer deposited hafnium oxide thin films through vertical cavity surface-emitting laser (VCSEL)-Based ultra-rapid heating |
Auteur: |
Kim, Jae-Hwan Kim, Dohyoung Cho, Jeong-Won Hwang, Heesu Noh, Young-Soo Lee, Myeong-Ill Bae, Seung-Muk Cheon, Taehoon Oh, Youkeun Kim, Dokyun Yoo, Chanyoung Park, Seungho Hwang, Jin-Ha |
Verschenen in: |
Ceramics international |
Paginering: |
Jaargang 50 () nr. 21PC pagina's 43819-43827 |
Jaar: |
2024 |
Inhoud: |
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Uitgever: |
Elsevier Ltd and Techna Group S.r.l. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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