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                                       Details for article 27 of 162 found articles
 
 
  Comparative study of titanium carbide films deposited by plasma-enhanced and conventional magnetron sputtering at various methane flow rates
 
 
Title: Comparative study of titanium carbide films deposited by plasma-enhanced and conventional magnetron sputtering at various methane flow rates
Author: Xie, Qi
Sun, Gaowei
Fu, Zhiqiang
Kang, Jiajie
Zhu, Lina
She, Dingshun
Lin, Songsheng
Appeared in: Ceramics international
Paging: Volume 49 () nr. 15 pages 25269-25282
Year: 2023
Contents:
Publisher: Elsevier Ltd and Techna Group S.r.l.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 27 of 162 found articles
 
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