High energy (150 MeV) Fe11+ ion beam induced modifications of physico-chemical and photoluminescence properties of high-k dielectric nanocrystalline zirconium oxide thin films
Titel:
High energy (150 MeV) Fe11+ ion beam induced modifications of physico-chemical and photoluminescence properties of high-k dielectric nanocrystalline zirconium oxide thin films
Auteur:
Chauhan, Vishnu Gupta, Rashi Kumar, V. Ram, J. Singh, F. Prasad, M. Kumar, S. Ojha, S. Alvi, P.A. Mehra, R. Kumar, Rajesh