Annealing-temperature-modulated optical, electrical properties, and leakage current transport mechanism of sol–gel-processed high-k HfAlOx gate dielectrics
Titel:
Annealing-temperature-modulated optical, electrical properties, and leakage current transport mechanism of sol–gel-processed high-k HfAlOx gate dielectrics
Auteur:
Jin, P. He, G. Fang, Z.B. Liu, M. Xiao, D.Q. Gao, J. Jiang, S.S. Li, W.D. Sun, Z.Q. Zhang, M.