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Journal description
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Details for article 40 of 46 found articles
| Title: |
Synthesis and characterization of low pressure chemically vapor deposited titanium nitride films using TiCl4 and NH3 |
| Author: |
Ramanuja, N Levy, R.A Dharmadhikari, S.N Ramos, E Pearce, C.W Menasian, S.C Schamberger, P.C Collins, C.C |
| Appeared in: |
Materials letters |
| Paging: | Volume 57 (2002) nr. 2 pages 9 p. |
| Year: |
2002 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 40 of 46 found articles
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