Gas-phase parasitic reactions and Al incorporation efficiency in light radiation heating, low-pressure metal–organic chemical vapor deposition of AlGaN
Titel:
Gas-phase parasitic reactions and Al incorporation efficiency in light radiation heating, low-pressure metal–organic chemical vapor deposition of AlGaN
Auteur:
Zhou, Y.G Zhang, R Li, W.P Shen, B Chen, P Chen, Z.Z Gu, S.L Shi, Y Zheng, Y.D Huang, Z.C