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Journal description
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Details for article 6 of 12 found articles
| Title: |
Bonding silicon wafers by use of electrostatic fields followed by rapid thermal heating |
| Author: |
Lu, Deren Wortman, J.J. Fathy, D. |
| Appeared in: |
Materials letters |
| Paging: | Volume 4 (1986) nr. 11-12 pages 4 p. |
| Year: |
1986 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 6 of 12 found articles
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