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  A fluorine-related passivation layer on etched Al–Cu (1%) alloy surfaces on silicon after SF6 plasma treatments
 
 
Title: A fluorine-related passivation layer on etched Al–Cu (1%) alloy surfaces on silicon after SF6 plasma treatments
Author: Baek, Kyu-Ha
Yoon, Yong-Sun
Park, Jong-Moon
Kwon, Kwang-Ho
Chang-Il Kim,
Nam, Kee-Soo
Appeared in: Materials letters
Paging: Volume 35 (1998) nr. 3-4 pages 5 p.
Year: 1998
Contents:
Publisher: Elsevier Science B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

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