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Details for article 10 of 92 found articles
| Title: |
Area-selective atomic layer deposition of Ru thin films using phosphonic acid self-assembled monolayers for metal/dielectric selectivity |
| Author: |
Lee, Seo-Hyun Lee, Jeong-Min Lee, Ji Hun Kwak, Junghun Chung, Sung-Woong Kim, Woo-Hee |
| Appeared in: |
Materials letters |
| Paging: | Volume 328 () nr. C pages p. |
| Year: |
2022 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 10 of 92 found articles
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