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Controllable nano-texturing of diamond wire sawing polysilicon wafers through low-cost copper catalyzed chemical etching |
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Titel: |
Controllable nano-texturing of diamond wire sawing polysilicon wafers through low-cost copper catalyzed chemical etching |
Auteur: |
Sheng, Guizhang Zou, YuXin Li, Shaoyuan Ma, Wenhui Ding, Zhao Xi, Fengshuo Geng, Chao He, Zudong Chen, Zhengjie Yang, Jia Lei, Yun |
Verschenen in: |
Materials letters |
Paginering: |
Jaargang 221 (2018) nr. C pagina's 85-88 |
Jaar: |
2018 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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