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Journal description
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Details for article 13 of 19 found articles
| Title: |
Low thermal budget in situ cleaning and passivation for silicon epitaxy in a multichamber rapid thermal processing cluster tool |
| Author: |
Sanganeria, Mahesh K. Violette, Katherine E. Öztürk, Mehmet C. Harris, Gari Lee, C.Archie Maher, Dennis M. |
| Appeared in: |
Materials letters |
| Paging: | Volume 21 (1994) nr. 2 pages 5 p. |
| Year: |
1994 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 13 of 19 found articles
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