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Journal description
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Details for article 71 of 157 found articles
| Title: |
LPCVD of silicon dioxide by pyrolysis of teos in a rapid thermal processor |
| Author: |
Miller, R. Öztürk, M.C. Wortman, J.J. Johnson, F.S. Grider, D.T. |
| Appeared in: |
Materials letters |
| Paging: | Volume 8 (1989) nr. 9 pages 4 p. |
| Year: |
1989 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 71 of 157 found articles
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