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                                       Details for article 149 of 178 found articles
 
 
  Synthesis and characterization of hafnium tert-butylacetoacetate as new MOCVD precursor for HfO2 films
 
 
Title: Synthesis and characterization of hafnium tert-butylacetoacetate as new MOCVD precursor for HfO2 films
Author: Pasko, Sergej
Hubert-Pfalzgraf, Liliane G.
Abrutis, Adulfas
Appeared in: Materials letters
Paging: Volume 59 (2005) nr. 14-15 pages 5 p.
Year: 2005
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 149 of 178 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands