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Journal description
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Details for article 11 of 178 found articles
| Title: |
A resonant method for determining mechanical properties of Si3N4 and SiO2 thin films |
| Author: |
Dai, Ching-Liang Chang, Yuan-Ming |
| Appeared in: |
Materials letters |
| Paging: | Volume 61 (2007) nr. 14-15 pages 4 p. |
| Year: |
2007 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 11 of 178 found articles
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