|
| next >> |
Journal description
All volumes of the corresponding journal
All issues of the corresponding volume
All articles of the corresponding issues
Details for article 1 of 7 found articles
| Title: |
A neural network-based procedure for the process monitoring of clustered defects in integrated circuit fabrication |
| Author: |
Su, Chao-Ton Tong, Lee-Ing |
| Appeared in: |
Computers in industry |
| Paging: | Volume 34 (1997) nr. 3 pages 10 p. |
| Year: |
1997 |
| Contents: | |
| Publisher: |
Elsevier Science B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 1 of 7 found articles
| next >> |