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Structure with thin SiOx/SiNx bilayer and Al electrodes for high-frequency, large-coupling, and low-cost surface acoustic wave devices |
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Titel: |
Structure with thin SiOx/SiNx bilayer and Al electrodes for high-frequency, large-coupling, and low-cost surface acoustic wave devices |
Auteur: |
Shen, Junyao Fu, Sulei Su, Rongxuan Xu, Huiping Wang, Weibiao Lu, Zengtian Feng, Qiong Zeng, Fei Song, Cheng Pan, Feng |
Verschenen in: |
Ultrasonics |
Paginering: |
Jaargang 115 () nr. C pagina's p. |
Jaar: |
2021 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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