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                                       Details for article 52 of 59 found articles
 
 
  The design concept and implementation of ultra-precision thinning grinder for SiC wafers
 
 
Title: The design concept and implementation of ultra-precision thinning grinder for SiC wafers
Author: Li, Tianyu
Zhu, Xianglong
Kang, Renke
Dai, Lihao
Li, Meng
Appeared in: Precision engineering
Paging: Volume 94 () nr. C pages 251-263
Year: 2025
Contents:
Publisher: Elsevier Inc.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 52 of 59 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands