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                                       Details for article 28 of 59 found articles
 
 
  Hybrid dual-stage fast tool servo for integrated machining and measurement of optical microstructures
 
 
Title: Hybrid dual-stage fast tool servo for integrated machining and measurement of optical microstructures
Author: Meng, Yixuan
Tan, Lingwen
Wu, Hao
Wang, Xiangyuan
Zhu, ZhiWei
Zhang, XinQuan
Ren, MingJun
Cheung, Benny C.F.
Zhu, LiMin
Appeared in: Precision engineering
Paging: Volume 94 () nr. C pages 264-277
Year: 2025
Contents:
Publisher: Published by Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 28 of 59 found articles
 
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 Koninklijke Bibliotheek - National Library of the Netherlands