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Journal description
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Details for article 25 of 35 found articles
| Title: |
Microscopic stress analysis of nanoscratch induced sub-surface defects in a single-crystal silicon wafer |
| Author: |
Huang, Ning Zhou, Ping Goel, Saurav |
| Appeared in: |
Precision engineering |
| Paging: | Volume 82 () nr. C pages 290-303 |
| Year: |
2023 |
| Contents: | |
| Publisher: |
Published by Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 25 of 35 found articles
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