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Journal description
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Details for article 42 of 56 found articles
| Title: |
Near-field microscopy inspection of nano scratch defects on the monocrystalline silicon surface |
| Author: |
Yan, Ying Wang, Yonghao Zhou, Ping Huang, Ning Guo, Dongming |
| Appeared in: |
Precision engineering |
| Paging: | Volume 56 (2019) nr. C pages 506-512 |
| Year: |
2019 |
| Contents: | |
| Publisher: |
Elsevier Inc. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 42 of 56 found articles
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