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Quantitative analysis of effect of dopant interaction on microstructural, physical, and electrical properties in laser-annealed SiGe:B:Ga film |
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Titel: |
Quantitative analysis of effect of dopant interaction on microstructural, physical, and electrical properties in laser-annealed SiGe:B:Ga film |
Auteur: |
Lee, Kiseok Baik, Seunghyun Kang, Joosung Shin, Hyerin Yoon, Dongmin Kim, Soyoung Moon, Jinwoo Suh, Dong-Chan Ko, Dae-Hong |
Verschenen in: |
Thin solid films |
Paginering: |
Jaargang 748 () nr. C pagina's p. |
Jaar: |
2022 |
Inhoud: |
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Uitgever: |
Elsevier B.V. |
Bronbestand: |
Elektronische Wetenschappelijke Tijdschriften |
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