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Journal description
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Details for article 23 of 48 found articles
| Title: |
Investigation of the effects of bottom anti-reflective coating on nanoscale patterns by laser interference lithography |
| Author: |
Park, Eun-Mi Choi, Jinnil Kang, Byung Hyun Dong, Ki-Young Park, YunKwon Song, In Sang Ju, Byeong-Kwon |
| Appeared in: |
Thin solid films |
| Paging: | Volume 519 (2011) nr. 13 pages 5 p. |
| Year: |
2011 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 23 of 48 found articles
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