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Journal description
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Details for article 32 of 73 found articles
| Title: |
Influence of N2 flow rate on the mechanical properties of SiN x films deposited by microwave electron cyclotron resonance magnetron sputtering |
| Author: |
Ding, Wanyu Xu, Jun Lu, Wenqi Deng, Xinlu Dong, Chuang |
| Appeared in: |
Thin solid films |
| Paging: | Volume 518 (2010) nr. 8 pages 5 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 32 of 73 found articles
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