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Journal description
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Details for article 43 of 59 found articles
| Title: |
Reflective multilayer optics for 6.7nm wavelength radiation sources and next generation lithography |
| Author: |
Tsarfati, T. van de Kruijs, R.W.E. Zoethout, E. Louis, E. Bijkerk, F. |
| Appeared in: |
Thin solid films |
| Paging: | Volume 518 (2009) nr. 5 pages 4 p. |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 43 of 59 found articles
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