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Journal description
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Details for article 41 of 59 found articles
| Title: |
Quantification of the incorporation coefficient of a reactive gas on a metallic film during magnetron sputtering: The method and results |
| Author: |
Leroy, W.P. Mahieu, S. Persoons, R. Depla, D. |
| Appeared in: |
Thin solid films |
| Paging: | Volume 518 (2009) nr. 5 pages 5 p. |
| Year: |
2009 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 41 of 59 found articles
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