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Structured ZnO-based contacts deposited by non-reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask |
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Title: |
Structured ZnO-based contacts deposited by non-reactive rf magnetron sputtering on ultra-thin SiO2/Si through a stencil mask |
Author: |
Barnabé, A. Lalanne, M. Presmanes, L. Soon, J.M. Tailhades, Ph. Dumas, C. Grisolia, J. Arbouet, A. Paillard, V. BenAssayag, G. van den Boogaart, M.A.F. Savu, V. Brugger, J. Normand, P. |
Appeared in: |
Thin solid films |
Paging: |
Volume 518 (2009) nr. 4 pages 4 p. |
Year: |
2009 |
Contents: |
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Publisher: |
Elsevier B.V. |
Source file: |
Elektronische Wetenschappelijke Tijdschriften |
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