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Journal description
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Details for article 7 of 65 found articles
| Title: |
Electrical characterisation of HfYO MIM-structures deposited by ALD |
| Author: |
Roessler, T. Gluch, J. Albert, M. Bartha, J.W. |
| Appeared in: |
Thin solid films |
| Paging: | Volume 518 (2010) nr. 16 pages 4 p. |
| Year: |
2010 |
| Contents: | |
| Publisher: |
Elsevier B.V. |
| Source file: |
Elektronische Wetenschappelijke Tijdschriften |
Details for article 7 of 65 found articles
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