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                                       Details for article 34 of 75 found articles
 
 
  Influence of residual stress on diffusion-induced bending in bilayered microcantilever sensors
 
 
Title: Influence of residual stress on diffusion-induced bending in bilayered microcantilever sensors
Author: Xuan, Fu-Zhen
Shao, Shan-Shan
Wang, Zhengdong
Tu, Shan-Tung
Appeared in: Thin solid films
Paging: Volume 518 (2010) nr. 15 pages 6 p.
Year: 2010
Contents:
Publisher: Elsevier B.V.
Source file: Elektronische Wetenschappelijke Tijdschriften
 
 

                             Details for article 34 of 75 found articles
 
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